Accurate Measurements of Wall Shear Stress on a Plate with Elliptic Leading Edge
A micro-floating element wall shear stress sensor with backside connections has been developed for accurate measurements of wall shear stress under the turbulent boundary layer.The micro-sensor was designed and fabricated on a 10.16 cm SOI (Silicon on Insulator) wafer by MEMS (Micro-Electro-Mechanical System) processing technology.Then, it was cali